This paper reviews the product lines for automotive MEMS gyroscopes for the applications ESP, roll-over detection for airbag systems, and navigation systems by describing their silicon micro machining technology, working principle, and packaging technology. In each of these technology areas, important progress has been made in the past decade which enabled a very broad market acceptance for MEMS gyroscope sensors. Additionally, the paper discusses important future trends of MEMS gyroscopes that arise due to changing system requirements and due to the impact of upcoming non-automotive applications.
MEMS gyroscopes for automotive applications
MEMS-Gyroskope für den Einsatz im Fahrzeug
2007
16 Seiten, 11 Bilder, 1 Tabelle, 9 Quellen
Aufsatz (Konferenz)
Englisch
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