GaN microLED devices with integrated microlenses have been demonstrated. The microlenses, with a focal length of 24 /spl mu/m and an r.m.s. roughness of /spl sim/ 1 nm, are fabricated on the polished backside of the sapphire substrate by inductively-coupled plasma (ICP) etching.
GaN micro-LED arrays with integrated sapphire microlenses
2003-01-01
214967 byte
Conference paper
Electronic Resource
English
GaN Micro-LED Arrays with Integrated Sapphire Micro-Lenses
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