In this work, diffractive microlenses were fabricated in GaN-based material by using gravy-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN anti-reflection thin films in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can be potentially used in the UV micro-optics system such as solar-blind detection applications. In the design example of this work, the structure may enhance the ultraviolet/visible rejection to be 10/sup 2/.


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    Title :

    GaN diffractive microlenses for UV micro-optics system


    Contributors:
    Hou, C.C. (author) / Li, M.H. (author) / Chen, C.C. (author) / Sheu, J.K. (author) / Chang, J.Y. (author) / Chi, G.C. (author) / Chuck Wu, (author) / Cheng, W.T. (author) / Yeh, J.H. (author)


    Publication date :

    2003-01-01


    Size :

    77575 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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