We demonstrate deep UV lithography at 248 nm to be a useful fabrication tool for nanophotonics, including photonic crystals, operating at telecom wavelengths. The structures are of high quality, and first results show low propagation losses.
Deep UV lithography for planar photonic crystal structures
2003-01-01
233556 byte
Conference paper
Electronic Resource
English
Deep UV Lithography for Planar Photonic Crystal Structures
British Library Conference Proceedings | 2003
|Photonic Crystal with Diamond-like Structure Fabricated by Holographic Lithography
British Library Conference Proceedings | 2005
|