Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) micromachining and microfabrication (MEMS-based) technology to fabricate miniaturized sensors; 2) the development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.


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    Title :

    Microfabricated chemical sensors for safety and emission control applications


    Contributors:
    Hunter, G.W. (author) / Neudeck, P.G. (author) / Liang-Yu Chen (author) / Knight, D. (author) / Liu, C.C. (author) / Wu, Q.H. (author)


    Publication date :

    1998-01-01


    Size :

    854047 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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