Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) micromachining and microfabrication (MEMS-based) technology to fabricate miniaturized sensors; 2) the development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.


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    Titel :

    Microfabricated chemical sensors for safety and emission control applications


    Beteiligte:
    Hunter, G.W. (Autor:in) / Neudeck, P.G. (Autor:in) / Liang-Yu Chen (Autor:in) / Knight, D. (Autor:in) / Liu, C.C. (Autor:in) / Wu, Q.H. (Autor:in)


    Erscheinungsdatum :

    01.01.1998


    Format / Umfang :

    854047 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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