The resolution of an angle-scanning technique for measuring Fabry-Perot etalons is analysed and it is shown that sub-nanometre resolution can be readily achieved in the measurement of optical thickness variations.


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    Title :

    High-resolution metrology of high-finesse filters


    Contributors:


    Publication date :

    2005-01-01


    Size :

    188830 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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