The resolution of an angle-scanning technique for measuring Fabry-Perot etalons is analysed and it is shown that sub-nanometre resolution can be readily achieved in the measurement of optical thickness variations.
High-resolution metrology of high-finesse filters
2005-01-01
188830 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
High-Resolution Metrology of High-Finesse Filters
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