The resolution of an angle-scanning technique for measuring Fabry-Perot etalons is analysed and it is shown that sub-nanometre resolution can be readily achieved in the measurement of optical thickness variations.


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    Titel :

    High-resolution metrology of high-finesse filters


    Beteiligte:
    Farrant, D.I. (Autor:in) / Arkwright, J.W. (Autor:in) / Fairman, P.S. (Autor:in)


    Erscheinungsdatum :

    2005-01-01


    Format / Umfang :

    188830 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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