We investigated the effect of linewidth fluctuations and sidewall roughness on wavelength spectra in scatterometry using rigorous coupled wave analysis. For both cases the influence of mean values and fluctuations can be separated.


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    Title :

    Effect of linewidth fluctuations and sidewall roughness in scatterometry


    Contributors:
    Schuster, T. (author) / Kenvien, N. (author) / Osten, W. (author) / Reinig, P. (author) / Moert, M. (author) / Hingst, T. (author) / Mantz, U. (author)


    Publication date :

    2005-01-01


    Size :

    280338 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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