We investigated the effect of linewidth fluctuations and sidewall roughness on wavelength spectra in scatterometry using rigorous coupled wave analysis. For both cases the influence of mean values and fluctuations can be separated.
Effect of linewidth fluctuations and sidewall roughness in scatterometry
01.01.2005
280338 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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