Three structures of silicon light emitting sources are described, each presenting higher electrical-to-optical conversion efficiency. The advantage of these structures lay in the fact that they were all fabricated using conventional standard VLSI technology, without any alternation of the processing procedure.
Planar silicon light emitting sources in standard 1.2 and 2 micron CMOS technology
2001-01-01
250339 byte
Conference paper
Electronic Resource
English
Planar Silicon Light Emitting Source in Standard 1.2 and 2 micron CMOS Technology
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