This paper will overview our work on the fabrication of photonic crystals using advanced silicon processing techniques. We will discuss the fabrication of three-dimensional silicon structures, metallic three-dimensional structures and dielectric one-dimensional structures.


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    Title :

    Photonic lattices fabricated using Si lithographic processes


    Contributors:
    Fleming, J.G. (author) / Lin, S.-Y. (author)


    Publication date :

    2003-01-01


    Size :

    68895 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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