This paper will overview our work on the fabrication of photonic crystals using advanced silicon processing techniques. We will discuss the fabrication of three-dimensional silicon structures, metallic three-dimensional structures and dielectric one-dimensional structures.


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    Titel :

    Photonic lattices fabricated using Si lithographic processes


    Beteiligte:
    Fleming, J.G. (Autor:in) / Lin, S.-Y. (Autor:in)


    Erscheinungsdatum :

    01.01.2003


    Format / Umfang :

    68895 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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