This paper will overview our work on the fabrication of photonic crystals using advanced silicon processing techniques. We will discuss the fabrication of three-dimensional silicon structures, metallic three-dimensional structures and dielectric one-dimensional structures.
Photonic lattices fabricated using Si lithographic processes
01.01.2003
68895 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Photonic lattices fabrication using Si lithographic processes
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