A displacement sensor that uses both two-wavelength interferometry and a novel two-wavelength laser source is proposed. This system accurately measures displacement to within range of several hundred /spl mu/m and resolution to within /spl sim/3 /spl mu/m, respectively.
Interferometric displacement measurement by use of time-shared two-wavelength laser diode
Conference on Lasers and Electro-Optics, 2004. (CLEO). ; 1 ; 1 pp. vol.1
2004-01-01
97616 byte
Conference paper
Electronic Resource
English
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