A displacement sensor that uses both two-wavelength interferometry and a novel two-wavelength laser source is proposed. This system accurately measures displacement to within range of several hundred /spl mu/m and resolution to within /spl sim/3 /spl mu/m, respectively.


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    Title :

    Interferometric displacement measurement by use of time-shared two-wavelength laser diode


    Contributors:
    Suzuki, T. (author) / Mitomi, M. (author) / Sasaki, O. (author)


    Publication date :

    2004-01-01


    Size :

    97616 byte



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




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