A displacement sensor that uses both two-wavelength interferometry and a novel two-wavelength laser source is proposed. This system accurately measures displacement to within range of several hundred /spl mu/m and resolution to within /spl sim/3 /spl mu/m, respectively.


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    Titel :

    Interferometric displacement measurement by use of time-shared two-wavelength laser diode


    Beteiligte:
    Suzuki, T. (Autor:in) / Mitomi, M. (Autor:in) / Sasaki, O. (Autor:in)


    Erscheinungsdatum :

    01.01.2004


    Format / Umfang :

    97616 byte



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch




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