We have developed a laser-terahertz emission microscope for inspecting the electrical faults in integrated circuits. By improving the spatial resolution of the system, we successfully observed the THz emission image in a microprocessor chip on standby.
Development of laser-terahertz emission microscope for inspecting the electrical faults in semiconductor devices
Conference on Lasers and Electro-Optics, 2004. (CLEO). ; 2 ; 3 pp. vol.2
2004-01-01
185562 byte
Conference paper
Electronic Resource
English
Laser Terahertz Emission Microscope
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