We have developed a laser-terahertz emission microscope for inspecting the electrical faults in integrated circuits. By improving the spatial resolution of the system, we successfully observed the THz emission image in a microprocessor chip on standby.


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    Title :

    Development of laser-terahertz emission microscope for inspecting the electrical faults in semiconductor devices


    Contributors:
    Yamashita, M. (author) / Kiwa, T. (author) / Tonouchi, M. (author) / Kawase, K. (author)


    Publication date :

    2004-01-01


    Size :

    185562 byte



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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