We have developed a laser-terahertz emission microscope for inspecting the electrical faults in integrated circuits. By improving the spatial resolution of the system, we successfully observed the THz emission image in a microprocessor chip on standby.


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    Titel :

    Development of laser-terahertz emission microscope for inspecting the electrical faults in semiconductor devices


    Beteiligte:
    Yamashita, M. (Autor:in) / Kiwa, T. (Autor:in) / Tonouchi, M. (Autor:in) / Kawase, K. (Autor:in)


    Erscheinungsdatum :

    2004-01-01


    Format / Umfang :

    185562 byte



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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