Laser terahertz emission microscope (LTEM) is proposed and developed. Two-dimensional images of THz emission are successfully captured from various kinds of materials and devices. The results suggest that the LTEM system will be a useful tool for scientific imaging, and inspecting LSI chips.
Laser terahertz emission microscope and its application
2005-01-01
165616 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Laser Terahertz Emission Microscope
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