A 1 kHz operation for an ArF excimer laser has been achieved with a compact laser system. The average output power and the electrical efficiency are 13 W and 0.83%, respectively. The clearing ratio is measured to be 3.2. A spectrally narrowed ArF excimer laser for lithography experiments has also been developed on the basis of the design for the compact ArF excimer laser. A spectral bandwidth of 0.7 pm and a pulse energy of 5 mJ/pulse is obtained.


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    Title :

    1 kHz high repetition rate, compact ArF excimer laser and its applications


    Contributors:
    Sekita, H. (author) / Tada, A. (author) / Ito, S. (author)


    Publication date :

    1995-01-01


    Size :

    168189 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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