A 1 kHz operation for an ArF excimer laser has been achieved with a compact laser system. The average output power and the electrical efficiency are 13 W and 0.83%, respectively. The clearing ratio is measured to be 3.2. A spectrally narrowed ArF excimer laser for lithography experiments has also been developed on the basis of the design for the compact ArF excimer laser. A spectral bandwidth of 0.7 pm and a pulse energy of 5 mJ/pulse is obtained.
1 kHz high repetition rate, compact ArF excimer laser and its applications
1995-01-01
168189 byte
Conference paper
Electronic Resource
English
1 kHz High Repetition Rate, Compact ArF Excimer Laser and Its Applications
British Library Conference Proceedings | 1995
|5 kHz high repetition rate excimer laser
IEEE | 1995
|High-repetition-rate excimer laser for micromachining [4971-16]
British Library Conference Proceedings | 2003
|High-repetition-rate ArF excimer laser for microlithography [4088-80]
British Library Conference Proceedings | 2000
|