We demonstrate the imaging of two-dimensional patterns by IIM and compare the results achieved with a low NA lens having a long working distance, a large-field-of-view and a long depth-of-field with a Fourier optics model and a conventional microscope image of a high NA lens.


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    Title :

    Imaging interferometric microscopy of two-dimensional structures


    Contributors:


    Publication date :

    2003-01-01


    Size :

    314382 byte



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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