We have designed and fabricated tunable photonic-bandgap microcavities in optical waveguides, with strain modulation via thin-film piezoelectric actuators on deformable membranes. Cavity resonance tunability, with nanometer lattice control, is designed through perturbation on FDTD computations. Device fabrication integrates X-ray nanolithography, piezoelectric microactuators and bulk micromachining.
Tunable photonic-bandgap microcavity waveguides at 1.55 /spl mu/m
2003-01-01
487663 byte
Conference paper
Electronic Resource
English
MJ2 Electrically Injected Photonic Bandgap Microcavity Light Sources
British Library Conference Proceedings | 2001
|Spontaneous emission evaluation in a photonic bandgap microcavity
British Library Online Contents | 1999
|InP Microcavity LED Emitting at 1.55m
British Library Conference Proceedings | 1997
|Photonic bandgap approach in designing microcavity-based optical sensors [5450-60]
British Library Conference Proceedings | 2004
|