Long period waveguide gratings (LPWG) based on a low-loss negative tone epoxy Novolak resin polymer have been fabricated on SiO/sub 2//Si substrate using standard cleanroom processes: UV photolithography and reactive ion etching. A maximum attenuation of -18 dB and a minimum 3 dB bandwidth of 6 nm were measured, and the grating length is as short as 1 cm.


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    Title :

    Long-period waveguide gratings


    Contributors:
    Tsoi, H.C. (author) / Wong, W.H. (author) / Pun, E.Y.B. (author)


    Publication date :

    2003-01-01


    Size :

    226883 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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