Long period waveguide gratings (LPWG) based on a low-loss negative tone epoxy Novolak resin polymer have been fabricated on SiO/sub 2//Si substrate using standard cleanroom processes: UV photolithography and reactive ion etching. A maximum attenuation of -18 dB and a minimum 3 dB bandwidth of 6 nm were measured, and the grating length is as short as 1 cm.


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    Titel :

    Long-period waveguide gratings


    Beteiligte:
    Tsoi, H.C. (Autor:in) / Wong, W.H. (Autor:in) / Pun, E.Y.B. (Autor:in)


    Erscheinungsdatum :

    2003-01-01


    Format / Umfang :

    226883 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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