The key concept of MEMS (micro electro mechanical systems) technologies is to extend the VLSI fabrication capability to realize three- dimensional micro systems which are composed of electrical, mechanical, chemical and optical elements. Using VLSI fabrication processes such as photolithography, film deposition and etching, it is possible to obtain sub-micrometer-precision structures in a large quantity with excellent alignment between each other. In addition, movable structures such as micro mirrors and switches can be made by micromachining processes.


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    Title :

    Research activities of optical MEMS in Japan


    Contributors:
    Fujita, H. (author)


    Publication date :

    2001-01-01


    Size :

    170762 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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