The key concept of MEMS (micro electro mechanical systems) technologies is to extend the VLSI fabrication capability to realize three- dimensional micro systems which are composed of electrical, mechanical, chemical and optical elements. Using VLSI fabrication processes such as photolithography, film deposition and etching, it is possible to obtain sub-micrometer-precision structures in a large quantity with excellent alignment between each other. In addition, movable structures such as micro mirrors and switches can be made by micromachining processes.
Research activities of optical MEMS in Japan
01.01.2001
170762 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
MI1 Research Activities of Optical MEMS in Japan
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