Confocal photoluminescence has been used to spatially resolve AlGaAs composition changes of 4% and quantum well thickness reductions of 70% in a non-planar structure created by vapor phase epitaxial shadow masking.


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    Title :

    Characterization of non-planar shadow masked Al/sub x/Ga/sub 1-x/As structures by confocal photoluminescence microscopy


    Contributors:
    Sandusky, J.V. (author) / Armour, E.A. (author) / Ramer, J.C. (author) / Hersee, S.D. (author) / Brueck, S.R.J. (author)

    Published in:

    Proceedings of LEOS'94 ; 2 ; 5-6 vol.2


    Publication date :

    1994-01-01


    Size :

    191971 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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