Confocal photoluminescence has been used to spatially resolve AlGaAs composition changes of 4% and quantum well thickness reductions of 70% in a non-planar structure created by vapor phase epitaxial shadow masking.
Characterization of non-planar shadow masked Al/sub x/Ga/sub 1-x/As structures by confocal photoluminescence microscopy
Proceedings of LEOS'94 ; 2 ; 5-6 vol.2
1994-01-01
191971 byte
Conference paper
Electronic Resource
English
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