The present invention relates to a substrate conveying apparatus and a substrate conveying method using same. A substrate conveying apparatus according to one embodiment of the present invention receives a substrate from a counterpart apparatus or conveys a substrate to the counterpart apparatus. The substrate conveying apparatus comprises: an unmanned conveying vehicle which moves along a preset route; a main body disposed on the unmanned conveying vehicle; and a conveying hand which is disposed inside the main body such that at least part of the conveying hand protrudes out of the main body, and on which the substrate is loaded or unloaded, the conveying hand having, on one side, a positioning sensor for detecting a marker that is disposed on the counterpart apparatus and determining the difference in position with the counterpart apparatus, wherein the position of the conveying hand is corrected on the basis of the difference in position determined by the positioning sensor.

    La présente invention concerne un appareil de transport de substrat et un procédé de transport de substrat l'utilisant. Un appareil de transport de substrat selon un mode de réalisation de la présente invention reçoit un substrat d'un appareil homologue ou transporte un substrat vers l'appareil homologue. L'appareil de transport de substrat comprend : un véhicule de transport sans pilote qui se déplace le long d'un itinéraire prédéfini; un corps principal disposé sur le véhicule de transport sans pilote; et un bras de transport qui est disposé à l'intérieur du corps principal de sorte qu'au moins une partie du bras de transport fait saillie hors du corps principal, et sur laquelle le substrat est chargé ou déchargé, le bras de transport comportant, sur un côté, un capteur de positionnement pour détecter un marqueur qui est disposé sur l'appareil homologue et déterminer la différence de position avec l'appareil homologue, la position du bras de transport étant corrigée sur la base de la différence de position déterminée par le capteur de positionnement.

    본 발명은 기재 운반 장치 및 이를 이용하는 기재 운반 방법에 관한 발명이다. 본 발명의 일 실시예에 따른 기재 운반 장치는 상대 장치로부터 기재를 전달받거나 상기 상대 장치로 기재를 전달하는 장치로서, 기 설정된 경로를 따라 이동하는 무인 운반 차량, 상기 무인 운반 차량 상에 배치되는 본체 및 상기 본체의 내부에 배치되어 적어도 일부가 상기 본체의 외부로 돌출되며, 상기 기재가 로딩 또는 언로딩되고, 상기 상대 장치에 배치된 마커를 감지하여 상기 상대 장치와 위치 차이를 확인하는 위치 확인 센서를 일측에 구비하는 이송 핸드를 포함하고, 상기 위치 확인 센서가 확인한 위치 차이에 기초해, 상기 이송 핸드의 위치를 보정한다.


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    Title :

    SUBSTRATE CONVEYING HAND, SUBSTRATE CONVEYING APPARATUS, AND SUBSTRATE CONVEYING METHOD


    Additional title:

    BRAS DE TRANSPORT DE SUBSTRAT, APPAREIL DE TRANSPORT DE SUBSTRAT ET PROCÉDÉ DE TRANSPORT DE SUBSTRAT
    기재 운반 핸드, 기재 운반 장치 및 기재 운반 방법


    Contributors:
    KIM KWANG IL (author) / ROH JI HWAN (author) / KIM DONG HYUN (author) / KIM TAE GYEONG (author)

    Publication date :

    2023-07-06


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Korean


    Classification :

    IPC:    B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last



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