A substrate transfer apparatus and a substrate transfer system are disclosed. The substrate transfer apparatus including a main body and a plurality of main arms arranged side by side on the main body, wherein a plurality of branch arms are disposed on both sides of each of the main arms, and the plurality of main arms and the plurality of branch arms are disposed in a same supporting plane. When a substrate is transferred, the plurality of main arms and the plurality of branch arms are both disposed beneath the substrate and support the substrate together. Therefore, the downward recess of the substrate due to gravity action can be greatly reduced, so that the flatness of the substrate can be effectively improved, therefore, the display quality of the display product produced can be improved.


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    Title :

    Substrate transfer apparatus and system


    Contributors:
    LI FENG (author) / WANG KAI (author)

    Publication date :

    2018-05-22


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last / B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES



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