A substrate handling robot drive includes a drive chassis for one or more robot arms. A first housing is movable with respect to the chassis and includes at least a first shaft and a first motor subsystem for driving the first shaft. A Z-axis drives the first housing. A second housing is movable with respect to the chassis and includes at least a second shaft and a second motor subsystem for driving the second shaft. A Z-axis drive for the second housing is independently movable with respect to the Z-axis drive for the first housing.


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    Title :

    Robot system with independent arms


    Contributors:

    Publication date :

    2015-12-01


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    B66C Krane , CRANES / B25J Manipulatoren , MANIPULATORS / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES



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