A substrate handling robot drive includes a drive chassis for one or more robot arms. A first housing is movable with respect to the chassis and includes at least a first shaft and a first motor subsystem for driving the first shaft. A Z-axis drives the first housing. A second housing is movable with respect to the chassis and includes at least a second shaft and a second motor subsystem for driving the second shaft. A Z-axis drive for the second housing is independently movable with respect to the Z-axis drive for the first housing.
Robot system with independent arms
01.12.2015
Patent
Elektronische Ressource
Englisch