An inertial sensor unit includes a first inertial sensor and a second inertial sensor. The first inertial sensor has a first acceleration sensor element configured to detect an acceleration in a direction along the first axis, and a second acceleration sensor element configured to detect an acceleration in a direction along the second axis. The second inertial sensor has a third acceleration sensor element configured to detect an acceleration in a direction along the third axis, and a fourth acceleration sensor element configured to detect an acceleration in a direction along the first axis. The first acceleration sensor element, the second acceleration sensor element, the third acceleration sensor element, and the fourth acceleration sensor element have comb-tooth shaped detection electrodes.


    Access

    Download


    Export, share and cite



    Title :

    Inertial Sensor Unit, Electronic Apparatus, And Vehicle


    Contributors:

    Publication date :

    2021-03-04


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    B60W CONJOINT CONTROL OF VEHICLE SUB-UNITS OF DIFFERENT TYPE OR DIFFERENT FUNCTION , Gemeinsame Steuerung oder Regelung von Fahrzeug-Unteraggregaten verschiedenen Typs oder verschiedener Funktion / G01P MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK , Messen der Linear- oder Winkelgeschwindigkeit, der Beschleunigung, der Verzögerung oder des Stoßes



    Sensor unit, method of manufacturing sensor unit, inertial measurement device, electronic apparatus, and vehicle

    OTSUKI TETSUYA / KAZUNO MASATAKA | European Patent Office | 2022

    Free access

    Inertial sensor, electronic apparatus, and vehicle

    TAKIZAWA TERUO / NAGATA KAZUYUKI / YAMAZAKI SEIJI et al. | European Patent Office | 2023

    Free access

    Sensor Unit, Method Of Manufacturing Sensor Unit, Inertial Measurement Device, Electronic Apparatus, And Vehicle

    OTSUKI TETSUYA / KAZUNO MASATAKA | European Patent Office | 2019

    Free access

    Inertial Sensor, Electronic Apparatus, And Vehicle

    TAKIZAWA TERUO / NAGATA KAZUYUKI / YAMAZAKI SEIJI et al. | European Patent Office | 2021

    Free access

    Inertial sensor, electronic apparatus, and vehicle

    ITO FUMIYA | European Patent Office | 2022

    Free access