An inertial sensor unit includes a first inertial sensor and a second inertial sensor. The first inertial sensor has a first acceleration sensor element configured to detect an acceleration in a direction along the first axis, and a second acceleration sensor element configured to detect an acceleration in a direction along the second axis. The second inertial sensor has a third acceleration sensor element configured to detect an acceleration in a direction along the third axis, and a fourth acceleration sensor element configured to detect an acceleration in a direction along the first axis. The first acceleration sensor element, the second acceleration sensor element, the third acceleration sensor element, and the fourth acceleration sensor element have comb-tooth shaped detection electrodes.
Inertial Sensor Unit, Electronic Apparatus, And Vehicle
2021-03-04
Patent
Electronic Resource
English
IPC: | B60W CONJOINT CONTROL OF VEHICLE SUB-UNITS OF DIFFERENT TYPE OR DIFFERENT FUNCTION , Gemeinsame Steuerung oder Regelung von Fahrzeug-Unteraggregaten verschiedenen Typs oder verschiedener Funktion / G01P MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK , Messen der Linear- oder Winkelgeschwindigkeit, der Beschleunigung, der Verzögerung oder des Stoßes |
European Patent Office | 2022
|European Patent Office | 2019
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