An inertial sensor includes: a sensor unit; a base substrate having the sensor unit arranged at one surface thereof and having a first lateral surface and a second lateral surface; a package accommodating the sensor unit and the base substrate and having an inner bottom surface, a first inner wall surface, and a second inner wall surface; a first adhesive bonding together an other surface of the base substrate and an inner bottom surface of the package; a second adhesive bonding together the first inner wall surface of the package and the first lateral surface; and a third adhesive bonding together the second inner wall surface of the package and the second lateral surface.
Inertial sensor, electronic apparatus, and vehicle
2022-03-08
Patent
Electronic Resource
English
IPC: | G01P MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK , Messen der Linear- oder Winkelgeschwindigkeit, der Beschleunigung, der Verzögerung oder des Stoßes / B60R Fahrzeuge, Fahrzeugausstattung oder Fahrzeugteile, soweit nicht anderweitig vorgesehen , VEHICLES, VEHICLE FITTINGS, OR VEHICLE PARTS, NOT OTHERWISE PROVIDED FOR |