Embodiments of the disclosure provide a micromachined mirror assembly having multiple coating layers. In one example, the micromachined mirror assembly includes a micro mirror having a first thermal expansion coefficient, a reflective layer having a second thermal expansion coefficient, and a compensation layer having a third thermal expansion coefficient. The reflective layer is disposed on a top surface of the micro mirror and is reflective to incident light of the micromachined mirror assembly. The compensation layer is disposed on the reflective layer and is transparent to the incident light of the micromachined mirror assembly. The first thermal expansion coefficient is between the second thermal expansion coefficient and the third thermal expansion coefficient.
MICROMACHINED MIRROR ASSEMBLY HAVING MULTIPLE COATING LAYERS
2020-06-25
Patent
Electronic Resource
English
IPC: | G02B Optische Elemente, Systeme oder Geräte , OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS / B60R Fahrzeuge, Fahrzeugausstattung oder Fahrzeugteile, soweit nicht anderweitig vorgesehen , VEHICLES, VEHICLE FITTINGS, OR VEHICLE PARTS, NOT OTHERWISE PROVIDED FOR / G01S RADIO DIRECTION-FINDING , Funkpeilung |
MICROMACHINED MIRROR ASSEMBLY HAVING MULTIPLE COATING LAYERS
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