Embodiments of the disclosure provide a micromachined mirror assembly having multiple coating layers. In one example, the micromachined mirror assembly includes a micro mirror having a first thermal expansion coefficient, a reflective layer having a second thermal expansion coefficient, and a compensation layer having a third thermal expansion coefficient. The reflective layer is disposed on a top surface of the micro mirror and is reflective to incident light of the micromachined mirror assembly. The compensation layer is disposed on the reflective layer and is transparent to the incident light of the micromachined mirror assembly. The first thermal expansion coefficient is between the second thermal expansion coefficient and the third thermal expansion coefficient.


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    Titel :

    MICROMACHINED MIRROR ASSEMBLY HAVING MULTIPLE COATING LAYERS


    Beteiligte:
    ZHOU QIN (Autor:in) / WANG YOUMIN (Autor:in) / LEE SAE WON (Autor:in)

    Erscheinungsdatum :

    25.06.2020


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    G02B Optische Elemente, Systeme oder Geräte , OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS / B60R Fahrzeuge, Fahrzeugausstattung oder Fahrzeugteile, soweit nicht anderweitig vorgesehen , VEHICLES, VEHICLE FITTINGS, OR VEHICLE PARTS, NOT OTHERWISE PROVIDED FOR / G01S RADIO DIRECTION-FINDING , Funkpeilung



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