A physical quantity sensor includes: a base; wiring disposed in the base; a support that includes a first bonded surface bonded to the base and a second bonded surface bonded to the wiring; a suspension beam connected to the support; and an electrode finger supported by the suspension beam. The support is located between the first bonded surface and the suspension beam and includes a first overhang separated from the base.
Physical quantity sensor, physical quantity sensor device, electronic apparatus, and vehicle
2020-11-10
Patent
Electronic Resource
English
IPC: | G01P MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK , Messen der Linear- oder Winkelgeschwindigkeit, der Beschleunigung, der Verzögerung oder des Stoßes / B60G VEHICLE SUSPENSION ARRANGEMENTS , Radaufhängungen und Federungen für Fahrzeuge / B60T Bremsanlagen für Fahrzeuge oder Teile davon , VEHICLE BRAKE CONTROL SYSTEMS OR PARTS THEREOF / G05D SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES , Systeme zum Steuern oder Regeln nichtelektrischer veränderlicher Größen |
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