A physical quantity sensor includes a stationary electrode, an X-axis displaceable movable member, and a movable electrode. The stationary electrode includes first and second movable electrodes arranged side by side along the Y-axis direction. The first and second stationary electrodes respectively include first and second stationary electrode fingers extending from first and second trunks in the ±Y-axis directions. The movable electrode includes first and second movable electrodes arranged side by side in the Y-axis direction. The first and second movable electrodes respectively include first and second movable electrode fingers located on both sides in the Y-axis direction of the first and second trunks, and opposed to the first and second stationary electrode fingers.


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    Title :

    Physical quantity sensor, physical quantity sensor device, electronic apparatus, and vehicle


    Contributors:

    Publication date :

    2019-09-17


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    G01P MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK , Messen der Linear- oder Winkelgeschwindigkeit, der Beschleunigung, der Verzögerung oder des Stoßes / B60G VEHICLE SUSPENSION ARRANGEMENTS , Radaufhängungen und Federungen für Fahrzeuge