An ultrasonic element array includes a first piezoelectric element, a second piezoelectric element, a third piezoelectric element, and a fourth piezoelectric element each having a piezoelectric material sandwiched by a first electrode and a second electrode, a first wire connecting the second electrode of the first piezoelectric element and the second electrode of the second piezoelectric element, a second wire connecting the second electrode of the third piezoelectric element and the second electrode of the fourth piezoelectric element, a third wire connecting to the second wire over the first wire, and an insulating film located between the first wire and the third wire, wherein the insulating film has an inorganic insulating film made of an inorganic material and an organic insulating film made of an organic material, and the inorganic insulating film covers the piezoelectric elements.


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    Title :

    Ultrasonic element array, ultrasonic probe, ultrasonic apparatus, and manufacturing method for ultrasonic element array


    Contributors:

    Publication date :

    2020-05-19


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B06B GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL , Erzeugen oder Übertragen mechanischer Schwingungen allgemein / B60B VEHICLE WHEELS , Räder für Fahrzeuge



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