A probe is a three-layer substrate having two faces on which paired electrodes are formed at corresponding positions and guard patterns are formed around the electrodes. The guard patterns and all electrodes are driven by a common probe signal to an equal potential, thereby commonly guarding the electrodes. Based on a clamp current of each electrode, a capacitance is found to obtain gap data.
Gap sensor and gap measuring method using a capacitance measuring technique detecting or measuring gaps between conductive member surfaces
2019-12-24
Patent
Electronic Resource
English
IPC: | G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS , Messen der Länge, der Dicke oder ähnlicher linearer Abmessungen / B64F GROUND OR AIRCRAFT-CARRIER-DECK INSTALLATIONS SPECIALLY ADAPTED FOR USE IN CONNECTION WITH AIRCRAFT , Boden- oder Flugzeugträgerdeckeinrichtungen besonders ausgebildet für die Verwendung in Verbindung mit Luftfahrzeugen / H05K PRINTED CIRCUITS , Gedruckte Schaltungen |
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