To provide an optical deflector with which it is possible to improve a fracture limit angle and obtain a sufficient high field angle and high resolution.SOLUTION: The above problem is solved by an optical deflector that comprises: a mirror part having a reflection face for reflecting light; a pair of support parts for supporting the mirror and connected at one end to the mirror part; a pair of drive beams connected to the other end of each of the support parts, for deforming the support part and swinging the mirror around a first axis; a frame part for cantilevering the drive beam; and a connection part for connecting the support part and the drive beam. The connection part is connected to the drive beam in a first region closer to the drive beam side than the first axis, with a protrusion included in a second region opposite the first region of the connection part, which is of the shape protruding in a direction that faces a portion where the drive beam and the frame part are connected, and a first fillet part having a fillet shape is provided on the support part side of the protrusion.SELECTED DRAWING: Figure 1

    【課題】破壊限界角を向上させて、十分な高画角や、高解像を得ることができる光偏向器を提供する。【解決手段】光を反射する反射面を有するミラー部と、前記ミラー部と一端が接続されており前記ミラー部を支持する1対の支持部と、各々の前記支持部の他端と接続されており、前記支持部を変形させて前記ミラー部を第1軸を中心に回動させる1対の駆動梁と、前記駆動梁を片持ち支持する枠部と、前記支持部と前記駆動梁とを接続する接続部と、を有し、前記接続部は、前記第1軸よりも前記駆動梁側の第1の領域で前記駆動梁と接続されており、前記接続部において、前記第1の領域とは反対の第2の領域には、前記駆動梁と前記枠部とが接続されている部分とは対向する方向に突き出す形状である凸部を有しており、前記凸部の前記支持部側には、フィレット形状を有する第1のフィレット部が設けられていることを特徴とする光偏向器により、上記課題を解決する。【選択図】図1


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    Title :

    OPTICAL DEFLECTOR, DEFLECTING DEVICE, DISTANCE MEASURING DEVICE, IMAGE PROJECTION DEVICE, AND VEHICLE


    Additional title:

    光偏向器、偏向装置、距離測定装置、画像投影装置、及び車両


    Contributors:

    Publication date :

    2021-06-03


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Japanese


    Classification :

    IPC:    G02B Optische Elemente, Systeme oder Geräte , OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS / B60K Anordnung oder Einbau von Antriebseinheiten oder von Kraft- bzw. Drehmomentübertragungen in Fahrzeugen , ARRANGEMENT OR MOUNTING OF PROPULSION UNITS OR OF TRANSMISSIONS IN VEHICLES / B81B Mikrostrukturbauelemente oder -systeme, z.B. mikromechanische Bauelemente , MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES / G01S RADIO DIRECTION-FINDING , Funkpeilung / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES



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