PROBLEM TO BE SOLVED: To provide an optical deflector that can be more efficiently manufactured.SOLUTION: An inspection method of an optical deflector is provided for inspecting an optical deflector. The optical deflector includes a substrate having a first silicon layer and a second silicon layer, a drive part disposed on the substrate and performing resonance driving, and a pattern part for measuring the thickness of the second silicon pattern. The method includes a measurement step of measuring the thickness of the second silicon layer by the pattern part and a determination step of determining whether abnormality in a resonant frequency of the resonance driving is present or not based on the thickness measured in the measurement step.SELECTED DRAWING: Figure 15
【課題】光偏向器をより効率的に製造可能とする。【解決手段】光偏向器を検査する光偏向器検査方法であって、光偏向器は、第1のシリコン層と、第2のシリコン層と、を有する基板と、基板上に設けられ、共振駆動を行う駆動部と、第2のシリコン層の厚さを測定するためのパターン部と、を備え、パターン部により第2のシリコン層の厚さを測定する測定工程と、測定工程で測定した厚さに基づき、共振駆動の共振周波数に異常があるか否かを判断する判断工程と、を含む。【選択図】図15
INSPECTION METHOD OF OPTICAL DEFLECTOR, OPTICAL DEFLECTOR AND IMAGE PROJECTION DEVICE
光偏向器検査方法、光偏向器、および、画像投影装置
2018-10-04
Patent
Electronic Resource
Japanese
IPC: | G02B Optische Elemente, Systeme oder Geräte , OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS / B41J TYPEWRITERS , Schreibmaschinen / B60K Anordnung oder Einbau von Antriebseinheiten oder von Kraft- bzw. Drehmomentübertragungen in Fahrzeugen , ARRANGEMENT OR MOUNTING OF PROPULSION UNITS OR OF TRANSMISSIONS IN VEHICLES / B81B Mikrostrukturbauelemente oder -systeme, z.B. mikromechanische Bauelemente , MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES / B81C Verfahren oder Geräte besonders ausgebildet zur Herstellung oder Behandlung von Mikrostrukturbauelementen oder -systemen , PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS |
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