To provide non-destructive inspection equipment allowing for quantitative measurement at high resolution using backscattered X-ray, and allowing for automatic determination which is based on the above measurement result.SOLUTION: The non-destructive inspection equipment comprises: an X-ray source 1 for x-ray irradiation; a detector 2 which is installed on the same side as the X-ray source 1 relative to the position of the subject T and detects backscattered X-ray irradiated from the X-ray source 1 and scattered by a target T; a solar slit 3 installed in front of the detector 2 between the detector 2 and the subject T; a first filter 4 installed in front of the X-ray source 1 between the X-ray source 1 and the target; and a second filter 5 installed in front of the detector 2 between the detector 2 and the subject T.SELECTED DRAWING: Figure 1
【課題】後方散乱X線を用いて高い分解能で定量的な測定を可能とするとともに、その測定結果に基づく判定を自動化する非破壊検査装置を提供する。【解決手段】X線を照射するX線源1と、被写体Tの位置を基準としてX線源1と同じ側に設置されておりX線源1から照射されて被写体Tで散乱した後方散乱X線を検出する検出器2と、この検出器2と被写体Tとの間における検出器2の前に設置されたソーラースリット3と、X線源1と対象との間におけるX線源1の前に設置された第1のフィルタ4と、検出器2と被写体Tとの間における検出器2の前に設置された第2のフィルタ5と、を備える。【選択図】図1
NON-DESTRUCTIVE INSPECTION EQUIPMENT AND NON-DESTRUCTIVE INSPECTION METHOD
非破壊検査装置及び非破壊検査方法
2019-08-01
Patent
Electronic Resource
Japanese
IPC: | G01N Untersuchen oder Analysieren von Stoffen durch Bestimmen ihrer chemischen oder physikalischen Eigenschaften , INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES / B66B Aufzüge , ELEVATORS / G01T MEASUREMENT OF NUCLEAR OR X-RADIATION , Messung von Kern- oder Röntgenstrahlung / G21K TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR , Verfahren und Vorrichtungen zur Handhabung von Teilchen oder ionisierender Strahlung, soweit nicht anderweitig vorgesehen |
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