PROBLEM TO BE SOLVED: To provide a transport device which maintains an article in a horizontal state while reducing vibration transmitted to the article, and to provide a ceiling traveling vehicle.SOLUTION: A transport device 10 includes a holding device 11 for holding a front-opening unified pod (FOUP) 50. The holding device 11 includes at least a pair of hands 13 which supports the FOUP 50 from below. Each hand 13 includes: a body part 20; and a support part 40 which is provided on the body part 20 through a vibration control part 36 and supports the FOUP 50. The vibration control part 36 includes: a first vibration control material 33 which acts when a load exerted on the support part 40 is larger than a first load; and a second vibration control material 35 which acts when the load exerted on the support part 40 is larger than or equal to a second load larger than the first load.
【課題】物品に伝わる振動を低減しつつ、物品を水平に維持することができる搬送装置及び天井走行車を提供する。【解決手段】搬送装置10は、FOUP50を保持する保持装置11を備え、保持装置11は、FOUP50を下方から支持する少なくとも一対のハンド13を備え、ハンド13は、本体部20と、本体部20に対して防振部36を介して設けられ、FOUP50を支持する支持部40と、を備えている。防振部36は、支持部40に加わる荷重が第1の荷重よりも大きいときに作用する第1の防振材33と、支持部40に加わる荷重が第1の荷重よりも大きい第2の荷重以上のときに作用する第2の防振材35と、を有する。【選択図】図3
TRANSPORT DEVICE AND CEILING TRAVELING VEHICLE
搬送装置及び天井走行車
2015-11-09
Patent
Electronic Resource
Japanese
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