The invention relates to a device 10 for holding workpieces 30 in a process chamber. The invention additionally relates to a coating system 20 and to a method for coating a workpiece 30. In order to allow for precise adjustment of the height of the position of workpieces 30 while supporting same in a secure and stable manner, the holding device 10 comprises a tray 72 for the workpieces 30, a height-adjustable first support element 22 and a height-adjustable second support element 48 for the tray 72, wherein each of the support elements 22, 48 comprises at least one first and one second limb element 26, 56, wherein the respective first and the respective second limb element 26, 56 are coupled so as to be pivotable relative to one another about a pivot axis X, Y, and wherein the pivot axis X of the first support element 22 is arranged at an angle to the pivot axis Y of the second support element 48.


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    Title :

    SUBSTRAT-AUFNAHME FÜR PROZESSKAMMERN


    Additional title:

    SUBSTRATE RECEIVING AREA FOR PROCESS CHAMBERS
    ÉLÉMENT DE RÉCEPTION DE SUBSTRAT POUR CHAMBRES DE TRAITEMENT


    Contributors:
    MAY WALTER (author)

    Publication date :

    2022-11-16


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    German


    Classification :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / F16M Rahmen, Gehäuse oder Grundplatten von Kraftmaschinen oder anderen Maschinen oder von Apparaten, nicht auf eine besondere Art von Maschine oder Apparat eingeschränkt, die anderweitig vorgesehen ist , FRAMES, CASINGS, OR BEDS, OF ENGINES OR OTHER MACHINES OR APPARATUS, NOT SPECIFIC TO AN ENGINE, MACHINE, OR APPARATUS PROVIDED FOR ELSEWHERE / H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS



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