A storage system is disclosed to include a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves is coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions.


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    Title :

    INTEGRATED SYSTEMS FOR INTERFACING WITH SUBSTRATE CONTAINER STORAGE SYSTEMS


    Additional title:

    INTEGRIERTE SYSTEME ZUR HERSTELLUNG VON SCHNITTSTELLEN ZU SUBSTRATBEHÄLTERLAGERUNGSSYSTEMEN
    SYSTÈMES INTÉGRÉS POUR CRÉER UNE INTERFACE AVEC DES SYSTÈMES DE STOCKAGE DE BOÎTIERS DE SUBSTRAT


    Contributors:

    Publication date :

    2021-07-07


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen / B66C Krane , CRANES




    INTEGRATED SYSTEMS FOR INTERFACING WITH SUBSTRATE CONTAINER STORAGE SYSTEM

    BONORA ANTHONY C / GOULD RICHARD H / KROLAK MICHAEL | European Patent Office | 2017

    Free access


    Ships weapons systems interfacing

    Millward, S.J. | Tema Archive | 1979