A storage system is disclosed to include a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves is coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions.
INTEGRATED SYSTEMS FOR INTERFACING WITH SUBSTRATE CONTAINER STORAGE SYSTEMS
INTEGRIERTE SYSTEME ZUR HERSTELLUNG VON SCHNITTSTELLEN ZU SUBSTRATBEHÄLTERLAGERUNGSSYSTEMEN
SYSTÈMES INTÉGRÉS POUR CRÉER UNE INTERFACE AVEC DES SYSTÈMES DE STOCKAGE DE BOÎTIERS DE SUBSTRAT
2021-07-07
Patent
Electronic Resource
English
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