A storage system is disclosed to include a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves is coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions.


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    Titel :

    INTEGRATED SYSTEMS FOR INTERFACING WITH SUBSTRATE CONTAINER STORAGE SYSTEMS


    Weitere Titelangaben:

    INTEGRIERTE SYSTEME ZUR HERSTELLUNG VON SCHNITTSTELLEN ZU SUBSTRATBEHÄLTERLAGERUNGSSYSTEMEN
    SYSTÈMES INTÉGRÉS POUR CRÉER UNE INTERFACE AVEC DES SYSTÈMES DE STOCKAGE DE BOÎTIERS DE SUBSTRAT


    Beteiligte:
    BONORA ANTHONY C (Autor:in) / GOULD RICHARD H (Autor:in) / KROLAK MICHAEL (Autor:in)

    Erscheinungsdatum :

    07.07.2021


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen / B66C Krane , CRANES




    INTEGRATED SYSTEMS FOR INTERFACING WITH SUBSTRATE CONTAINER STORAGE SYSTEM

    BONORA ANTHONY C / GOULD RICHARD H / KROLAK MICHAEL | Europäisches Patentamt | 2017

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