The invention discloses a swing type lifting device and wafer detection equipment, and relates to the technical field of printing equipment, and the swing type lifting device is provided with a base, an objective table and a swing type lifting module comprising a rotation driving mechanism, an eccentric swing mechanism and a reversing transmission mechanism. During use, the rotary driving mechanism drives the eccentric swing mechanism to perform eccentric rotary motion, and the eccentric swing mechanism drives the reversing transmission mechanism to drive the objective table to ascend and descend when swinging in a vertical plane. Lifting circulation of the objective table can be completed through one-way rotation of the driving mechanism so as to facilitate feeding and discharging, and position precision loss caused by motor steering is avoided. Meanwhile, the stroke of the objective table completely depends on the eccentric distance of the eccentric wheel, and additional safety devices such as mechanical limiting devices are not needed. The mechanism is clear in principle, simple in structure, low in manufacturing cost, large in load capacity, capable of achieving high lifting motion precision and capable of guaranteeing the stability of the lifting process under the heavy-load working condition.

    本发明公开了一种摆动式升降装置及晶圆检测设备,涉及打印设备技术领域,通过设置基座、载物台以及包括旋转驱动机构、偏心摆动机构和换向传动机构的摆动式升降模组。使用时,旋转驱动机构驱动偏心摆动机构进行偏心旋转运动,偏心摆动机构在竖面内摆动时驱动换向传动机构带动载物台升降。驱动机构单向转动即可完成载物台升降循环以便上下料,避免了电机转向所导致的位置精度损失。同时,载物台行程完全取决于偏心轮的偏心距,无需额外的机械限位等安全装置。该机构原理清晰,结构简单,制造成本低,负载能力大,可以实现较高的升降运动精度,并且能够保证大负载工况下升降过程的平稳性。


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    Title :

    Swing type lifting device and wafer detection equipment


    Additional title:

    摆动式升降装置及晶圆检测设备


    Contributors:
    YANG HAONAN (author) / DENG HONGXIN (author) / TIAN XINGZHI (author)

    Publication date :

    2024-12-13


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last



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