The invention relates to the technical field of wafer box carrying, and discloses a wafer carrier loader which is characterized in that a driving assembly is arranged at the bottom of a carriage and used for driving the carriage to move. And the lower box receiving and sending device is arranged in the box bin, is used for collecting and pushing the wafer boxes, is arranged at the bottoms of the wafer boxes, and comprises a plurality of groups of guide rollers which rotate and roll through driving parts. The upper box receiving and sending device is arranged on the left side and the right side of the wafer box and used for being matched with the lower box receiving and sending device to synchronously collect and push the wafer box. The upper box receiving and sending device and the lower box receiving and sending device are arranged to feed or discharge the wafer box synchronously, so that the stability of the wafer box in the moving process can be improved, and the stability of the wafer is improved. By arranging the horizon sensor, whether the travel path of the carrier loader is correct or not and whether the loader body inclines or not can be monitored in real time. By arranging the driving assembly, the running stability of the carrier loader is improved.
本发明涉及晶圆盒运载技术领域,公开了一种晶圆运载车,所述驱动组件设置在车厢底部,用于驱动车厢位移。所述下接送盒装置设置在盒仓内,用于对晶圆盒进行收盒和推盒,所述下接送盒装置设置在晶圆盒底部,所述下接送盒装置包括多组通过驱动件做旋转滚动的导辊。所述上接送盒装置设置在晶圆盒左右两侧,用于配合下接送盒装置同步对晶圆盒进行收盒和推盒。通过设置上接送盒装置,与下接送盒装置同步对晶圆盒进行上料或下料,能提升晶圆盒在运动过程中的稳定性,提升对晶圆的稳定性。通过设置水平传感器,能实时监控运载车行径是否正确、是否出现车身倾斜。通过设置驱动组件,提升运载车行驶的稳定性。
Wafer carrier loader
一种晶圆运载车
2024-10-01
Patent
Electronic Resource
Chinese
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