The invention relates to the technical field of semiconductor manufacturing, in particular to a multi-size silicon single crystal rod intelligent transfer trolley and a silicon single crystal rod transfer method. The intelligent single crystal silicon rod transfer trolley comprises a clamping device, an AGV transfer chassis and a lifting and overturning device, the clamping device comprises clamping jaws and a direct-acting motor, the distance between the clamping jaws on the two sides is adjusted through translation of the single-side clamping jaw by means of the rear direct-acting motor, and a pressure sensor is arranged in the clamping jaw to adapt to the clamping size; the electric turntable and the rear lifting and overturning device are matched with each other to realize multi-posture adjustment of clamping the single crystal silicon rod, and meanwhile, the AGV transfer chassis can move at a fixed point among all working procedures according to a control instruction and a preset track. The specially designed clamping device is suitable for the single crystal silicon rods of multiple sizes, the clamping position and posture of the single crystal silicon rods can be flexibly adjusted, automatic transfer and butt joint of the single crystal silicon rods from the crystal pulling process to the barreling and cutting-off process are achieved, and the stability and cheapness of the transfer process are improved.
本发明涉及半导体制造技术领域,具体而言,涉及一种多尺寸单晶硅棒智能转运车及单晶硅棒转运方法。单晶硅棒智能转运车包含:夹持装置、AGV转运底盘、升降及翻转装置,夹持装置包括夹爪和直动电机,单侧夹爪依靠后置直动电机平动调节两侧夹爪间距,夹爪内置压力传感器自适应夹紧尺寸,电动转盘与后置的升降及翻转装置相互配合实现夹持单晶硅棒的多姿态调节,同时AGV转运底盘可依照控制指令及预设轨迹在各个工序间定点移动。本发明特殊设计的夹持装置适用于多尺寸单晶硅棒,可灵活调节单晶硅棒的夹持位置与姿态,实现了单晶硅棒由拉晶工序至滚磨、截断工序的自主转运与对接,提升了转运过程的稳定性及便宜性。
Multi-size silicon single crystal rod intelligent transfer trolley and silicon single crystal rod transfer method
一种多尺寸单晶硅棒智能转运车及单晶硅棒转运方法
2024-09-20
Patent
Electronic Resource
Chinese
IPC: | B60P Fahrzeuge zum Transport von Lasten oder zum Befördern, Tragen oder Aufnehmen besonderer Lasten oder Gegenstände , VEHICLES ADAPTED FOR LOAD TRANSPORTATION OR TO TRANSPORT, TO CARRY, OR TO COMPRISE SPECIAL LOADS OR OBJECTS / B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last |
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