The invention provides a silicon wafer transport vehicle which is used for transporting and transferring silicon wafer containing grooves. The silicon wafer transport vehicle comprises a vehicle body frame; the bearing mechanism is arranged on the vehicle body frame and is used for bearing the silicon wafer placing groove; the lifting mechanism is arranged on the vehicle body frame, the lifting mechanism comprises a lifting ejector rod and a driving assembly, and the lifting ejector rod is constructed to be driven by the driving assembly to lift the bearing mechanism; wherein the lifting ejector rod comprises a rod body part and a supporting part, the supporting part is arranged at the top end of the rod body part, and the diameter of the supporting part is larger than that of the rod body part, so that the top surface of the supporting part is in surface contact with the bearing mechanism. According to the silicon wafer transport vehicle, damage to the lifting ejector rod can be reduced, and the transport stability of the whole vehicle is improved.
本公开提供了一种硅片运输车,用于运输转移硅片放置槽;所述硅片运输车包括:车体框架;承托机构,所述承托机构设于所述车体框架上,用于承托所述硅片放置槽;升降机构,所述升降机构设于所述车体框架上,所述升降机构包括升降顶杆及驱动组件,其中所述升降顶杆被构造为受所述驱动组件的驱动而升降所述承托机构;其中,所述升降顶杆包括:杆体部及支撑部,所述支撑部设于所述杆体部的顶端,且所述支撑部的直径大于所述杆体部的直径,以使所述支撑部的顶面与所述承托机构之间为面接触。本公开实施例提供的硅片运输车能够减少升降顶杆发生损坏,提高整车运输稳定性。
Silicon wafer transport vehicle
一种硅片运输车
2024-02-27
Patent
Electronic Resource
Chinese
IPC: | B62B Von Hand bewegte Fahrzeuge, z.B. Handkarren oder Kinderwagen , HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS |
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