The invention discloses a multi-silicon-wafer transporting, taking and delivering vehicle which has the functions of lifting and stretching besides the conventional wafer transporting function, a first lifting mechanism is designed in a bearing, taking and delivering mechanism, the first lifting mechanism can drive a tray taking and delivering mechanism and a tray to ascend and descend, meanwhile, a telescopic guide rail is designed in the bearing, taking and delivering mechanism, and the telescopic guide rail can drive the tray taking and delivering mechanism and the tray to ascend and descend. Furthermore a telescopic guide rail is designed in the bearing, taking and delivering mechanism, furthermore frontward and backward telescoping of a tray bearing plate can be realized, and a tray is driven to perform frontward and backward telescoping. The taking and sending function of the transportation taking and sending vehicle can be completed through cooperation of the telescopic function and the lifting function, manual taking and sending are replaced, the transportation taking and sending vehicle can take and send a large number of silicon wafers at a time on the basis of transportation, the silicon wafer tray taking and sending efficiency is improved, the problem that high-temperature scalding is easily caused when the silicon wafers are manually taken and conveyed in the past is effectively solved; the transporting, taking and delivering vehicle has the advantages of being simple in structure, reasonable in design, convenient to use, capable of achieving one-time taking and delivering of a large number of silicon wafers, high in working efficiency, good in safety and the like.

    本发明公开了一种多硅片运输取送车,除了具备常规晶圆运送的功能外,还具备升降、伸缩的功能,在承托取送机构中设计有第一升降机构,该第一升降机构可带动托盘取送机构以及托盘进行升降,同时在承托取送机构中还设计有伸缩导轨,进而可实现托盘承托板的前后伸缩,带动托盘进行前后伸缩,通过伸缩功能与升降功的配合能够完成运输取送车的取送功能,以替代人工取送,使得该运输取送车在运送的基础上,还能够一次性取送大量硅片,提高硅片托盘取送效率的同时,有效解决以往人工取送硅片,容易存在高温烫伤的问题;该运输取送车,具有结构简单、设计合理、使用方便、可实现大量硅片的一次性取送、工作效率高,安全性好等优点。


    Access

    Download


    Export, share and cite



    Title :

    Multi-silicon-wafer transporting, taking and delivering vehicle


    Additional title:

    一种多硅片运输取送车


    Contributors:
    WU FENGLI (author) / WANG YI (author) / LIU WENMIN (author) / LIU ZHEN (author) / ZHANG YAXIN (author)

    Publication date :

    2021-07-20


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    B62B Von Hand bewegte Fahrzeuge, z.B. Handkarren oder Kinderwagen , HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS



    VEHICLE FOR TRANSPORTING AND DELIVERING ARTICLES

    CAMELLINI GIANCARLO / LULLI ALESSANDRO | European Patent Office | 2022

    Free access

    Automatic article transporting and delivering method and device

    WANG ZHANWANG / DENG XIANGRONG | European Patent Office | 2020

    Free access

    Quick-release pin type unmanned aerial vehicle cargo transporting and delivering device

    YANG CHANGSHENG / SUN AIDONG / YANG MIN et al. | European Patent Office | 2022

    Free access

    Multi-functional cage transporting vehicle

    YU XIAODONG | European Patent Office | 2015

    Free access

    Silicon wafer transport device and silicon wafer transport vehicle

    HU YICHAO | European Patent Office | 2024

    Free access